Gregor Feiertag : rechercher sur Z-Library

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1

Influence of a chip scale package on the frequency response of a MEMS microphone

Matthias Winter, Gregor Feiertag, Anton Leidl, Helmut Seidel

Journal:

Microsystem Technologies

Année:

2010

Langue:

english

Fichier:

PDF, 644 KB

english, 2010

2

Flip chip packaging for MEMS microphones

Gregor Feiertag, Matthias Winter, Anton Leidl

Journal:

Microsystem Technologies

Année:

2010

Langue:

english

Fichier:

PDF, 423 KB

english, 2010

3

Flip chip MEMS microphone package with large acoustic reference volume

Gregor Feiertag, Wolfgang Pahl, Matthias Winter, Anton Leidl, Stefan Seitz, Christian Siegel, Andreas Beer

Journal:

Procedia Engineering

Année:

2010

Langue:

english

Fichier:

PDF, 356 KB

english, 2010

4

Determining The Acoustic Resistance of Small Sound Holes for MEMS Microphones

Gregor Feiertag, Matthias Winter, Petko Bakardjiev, Elmar Schröder, Christian Siegel, Mustafa Yusufi, Peter Iskra, Anton Leidl

Journal:

Procedia Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 336 KB

english, 2011

5

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Chip scale package of a MEMS microphone and ASIC stack

Winter, Matthias, Feiertag, Gregor, Siegel, Christian, Leidl, Anton, Seidel, Helmut

Année:

2010

Langue:

english

Fichier:

PDF, 333 KB

english, 2010

6

SPIE Proceedings [SPIE SPIE Europe Microtechnologies for the New Millennium - Dresden, Germany (Monday 4 May 2009)] Smart Sensors, Actuators, and MEMS IV - Packaging of MEMS microphones

Feiertag, Gregor, Schmid, Ulrich, Winter, Matthias, Leidl, Anton

Année:

2009

Langue:

english

Fichier:

PDF, 547 KB

english, 2009

7

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - Pattern transfer accuracy in deep x-ray lithography: calculation and experimental results

Schmidt, Andreas, Ehrfeld, Wolfgang, Feiertag, Gregor, Luettge, Regina, Schmidt, Martin, Friedrich, Craig R., Vladimirsky, Yuli

Année:

1998

Langue:

english

Fichier:

PDF, 3.71 MB

english, 1998

8

A Framework for Calibration of Barometric MEMS Pressure Sensors

Dickow, Andreas, Feiertag, Gregor

Journal:

Procedia Engineering

Année:

2014

Langue:

english

Fichier:

PDF, 919 KB

english, 2014

9

SPIE Proceedings [SPIE SPIE Europe Microtechnologies for the New Millennium - Dresden, Germany (Monday 4 May 2009)] Smart Sensors, Actuators, and MEMS IV - A method for improving the drop test performance of a MEMS microphone

Winter, Matthias, Schmid, Ulrich, Ben Aoun, Seifeddine, Feiertag, Gregor, Leidl, Anton, Scheele, Patrick, Seidel, Helmut

Année:

2009

Langue:

english

Fichier:

PDF, 541 KB

english, 2009

10

SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA (Monday 10 March 1997)] Emerging Lithographic Technologies - Sloped irradiation techniques in deep x-ray lithography for 3D shaping of microstructures

Feiertag, Gregor, Ehrfeld, Wolfgang, Lehr, Heinz, Schmidt, Martin, Seeger, David E.

Année:

1997

Langue:

english

Fichier:

PDF, 828 KB

english, 1997

11

[IEEE 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Toulouse, France (2018.4.15-2018.4.18)] 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Simulation of thermomechanical stress of a MEMS microphone

Ebbinghaus, Hanna, Feiertag, Gregor, Walser, Sebastian

Année:

2018

Langue:

english

Fichier:

PDF, 614 KB

english, 2018